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Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials



  ID Publisher : 0000008722
  Nama Jurnal : IEEE Transactions On Insutrumentation and Measurement ( A Publication Of The IEEE Instrumentation and Measurement Society )
  Pengarang : Carlo Trigona, Bruno Ando, and Salvatore Baglio
  Subjek : Bulk and etch silicon on insulator (BESOI) technology, micro-optoelectromechenical systems (MOEMS), photonic bandgap materals
  Edisi : 63 / 3 / Maret 2014


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