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Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials



  ID Publisher : 0000008686
  Nama Jurnal : IEEE Transactions On Insutrumentation and Measurement ( A Publication Of The IEEE Instrumentation and Measurement Society )
  Pengarang : Carlo Trigona, Bruno Ando, and Salvatore Baglio,
  Subjek : Bulk and etch silicon on insulator (BESOI) technology, micro-optoelectromechanical systems (MOEMS), photonic bandgap materials.
  Edisi : / /





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