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Al Microheater and Ni Temperature Sensor Set based-on Photolithography with Closed-Loop Control



  ID Publisher : 0000020911
  Nama Jurnal : International Journal of Electrical and Computer Engineering (IJECE)
  Pengarang : Pittaya Deekla, Rungrueang Phatthanakun, Sarawut Sujitjorn, Nimit Chomnawang
  Subjek : Closed-loop control MEMS Microheater Photolithography Temperature sensor
  Edisi : 5 / 4 / Agustus 2015


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