The Fabrication of A MEMS-based Translational Vibratory Z-Axis Gyroscope Using DRIE on the Surface and Anisotropic Etching on the Backside of the Standard SOI Wafer
ID Publisher
: 0000018517
Nama Jurnal
: International Journal on Electrical Engineering and Informatics (IJEEI)
Pengarang
: Tris Dewi Indraswati, Adang Suwandi Ahmad, Irman Idris, and Adrian Venema
Subjek
: MEMS-based translational vibratory z-axis gyroscope, coriolis orce, MEMS technology, standard SOI wafer, angular movements.
GANTI PASSWORD
