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Effects of Deposition Parameters and Oxygen Addition on Properties of Sputtered Indium Tin Oxide Films



  ID Publisher : 0000015969
  Nama Jurnal : Makara Seri Teknologi (Makara Journal of Technology) - ISSN sebelumnya 1693-6698
  Pengarang : Badrul Munir, Rachmat Wibowo, Kim Ho
  Subjek : characterization, indium semiconductor, sputtering, thin films, tin oxide
  Edisi : 16 / 2 / November 2012


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