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A New Experimental Approach to Evaluate Plasma-induced Damage in Microcantilever



  ID Publisher : 0000015873
  Nama Jurnal : Makara Seri Teknologi (Makara Journal of Technology) - ISSN sebelumnya 1693-6698
  Pengarang : Yuki Nishimori, Shinji Ueki, Masakazu Sugiyama, Seiji Samukawa, Gen Hashiguchi
  Subjek : cantilever, neutral beam etching, surface loss
  Edisi : 17 / 2 / Agustus 2013


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