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Oxide Driven Strength Degradation of (1 1 1) Silicon Surfaces



  ID Publisher : 0000015689
  Nama Jurnal : MEMS and Nanotechnology : Proceedings of the 2015 Annual Conference on Experimental and Applied Mechanics
  Pengarang : Scott J. Grutzik and Alan T. Zehnder
  Subjek : Silicon Silicon dioxide Nanoscale strength Nanoscale testing Atomic force microscope
  Edisi : 5 / 0 / 2015


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